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Model No.
BM9040-0301
Rated Voltage(Vo-p)
3
Operating Voltage(Vo-p)
2~4
Rated Current(mA)
=100
Sound Output at 10cm
=85
Coil Resistance(?)
16±3
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Metal coatings
Barrier layers
Special Features
Magnetron sputter system for R&D and small scale production.
High speed pumping system equiped with cryogenic pump.
Automatic robot loading system.
Automatic positioning system between guns and substrate.
Convenient control on touch screen.
Specifications
Power : AC 2kW (13.56MHz), DC
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Model No.
BM9040-0301
Rated Voltage(Vo-p)
3
Operating Voltage(Vo-p)
2~4
Rated Current(mA)
=100
Sound Output at 10cm
=85
Coil Resistance(?)
16±3
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Model No.
BM9650E-0101
Rated Voltage(Vo-p)
1.5
Operating Voltage(Vo-p)
1~2
Rated Current(mA)
=80
Sound Output at 10cm
=90
Coil Resistance(?)
5..5±1
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Ferromagnetic materials deposition
Oxides deposition
Metals deposition
Special Features
Ultra-high-vacuum sputter system for R&D and small scale production(base pressure: 6 X 10-9 Torr).
Pumping system equiped with ion and turbo molecular pumps.
Predeposition process of oxides or metals in load-lock chamber.
Automatic mask loading
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Model No.
BM9650E-0101
Rated Voltage(Vo-p)
1.5
Operating Voltage(Vo-p)
1~2
Rated Current(mA)
=80
Sound Output at 10cm
=90
Coil Resistance(?)
5..5±1
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Model No.
BM9640E-0301
Rated Voltage(Vo-p)
3
Operating Voltage(Vo-p)
2~ 4
Rated Current(mA)
=90
Sound Output at 10cm
=85
Coil Resistance(?)
16±3
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Metal, ceramic, and alloy depositions for R&D in OLED fields.
Special Features
Cluster sputtering system for TCO deposition with two sputtering chambers and one glove box.
Robot transfer chamber between chambers and glove box.
Cassette loading type with glass holder.
Three tiltable 8" sputter guns and extra sputter gun ports in each
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Model No.
BM9640E-0301
Rated Voltage(Vo-p)
3
Operating Voltage(Vo-p)
2~ 4
Rated Current(mA)
=90
Sound Output at 10cm
=85
Coil Resistance(?)
16±3
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Model No.
BM6535-0101
Rated Voltage(Vo-p)
1.5
Operating Voltage(Vo-p)
1~3
Rated Current(mA)
=70
Sound Output at 10cm
=75
Coil Resistance(?)
8±1.5
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?
-
Applicable to various R&D fields that sputter deposition of metals and ceramic materials is necessary.
Application areas: semiconductor, display, solar cell, biochips, new materials, nanomaterials, and sample preparations, etc.
Special Features
RF or DC magnetron sputter for multipurpose R&D.
RF to DC power supply easily changed without
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Model No.
BM6535-0101
Rated Voltage(Vo-p)
1.5
Operating Voltage(Vo-p)
1~3
Rated Current(mA)
=70
Sound Output at 10cm
=75
Coil Resistance(?)
8±1.5
Resonant Frequency(Hz)
2700
Operating Temperature(? )
-20~+70
Storage Temperature(?