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Deposition of low melting point materials(ex, Al, Mg, etc.)
Special Features
Thermal evaporation with roll coating system for mass production.
Continuous Al feeder system.
Speedy deposition and throughput.
Specifications
Loading capacity : 5km per day
Average throughput : 15,000km per year
Dimension : 1,730L × 1,200H × 1,000W
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Dielectric materials in EL display device
Special Features
E-beam evaporation system for small scale organic EL device production.
In-line processed with glove box.
Side-sliding door type.
Smooth surface(RMS roughness < 20 nm).
Specifications
Wafer capacity : 1 × 5"
Average throughput Up to 5,000 wafers per year
Dimension :
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Optical coating applications
Hard coatings on plastics
Functional coating applications
Special Features
In-line electron beam evaporation system for a mass production with multiple beam sources.
Automatic process control through PC interfacing.
Carrier loading capability : 600 carriers/load, 2x27" sheets/carrier.
Standard tact time:
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Diaphragm Metalligations
Special Features
Roll to Roll System for mass production.
PC control based on PLC.
Metal deposition on flexible film
Flexible film thickness: 2um
Speedy deposition and throughput
Loading capacity : 5km per day
Average throughput 1,800km per year
Specifications
Dimension : 2,714L x 3,393H x 2,008W