FPD Equipment Products (LCD – Spin Coating)

Type Spin system Substrate size piece ~ up to 8" circle Rotation speed 300 ~ 8,000rpm(@without load) an error of less than 1% AC Servo Motor(100W/400W) Spin state 50steps, 20recipes (digital type) Bowl size 12", Stainless steel Acceleration /

Type Spin system Substrate size piece ~ up to 12" circle Rotation speed AC Servo Motor (400W) Spin state 50steps, 20recipes (digital type) Bowl size 12", Stainless steel Acceleration / Deceleration rate    Variable Chuck material Anodized AL, Acetal Electric power 220V,

Type Spin system Substrate size piece ~ up to 4" circle Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 1% DC Servo Motor Spin state 50steps, 20recipes (digital type) Bowl size 9", Acetal Acceleration / Deceleration rate Variable Chuck material Anodized AL, Acetal Electric

Type Spin system Substrate size piece ~ up to 4" circle Rotation speed DC Servo Motor Spin state 50steps, 20recipes (digital type) Bowl size 9", Acetal Acceleration / Deceleration rate Variable Chuck material Anodized AL, Acetal Electric power 220V,

D SERIES COATINGS Corrosion Proof, Transformable Feature D Series coating product is a water painting for spin coating, where the content of fluorine resin is far higher than other products, leading to very excellent non-adhesion. As it is mainly applied to Aluminum sheet with chemical surface treatment, the product is excellent in corrosion

D SERIES COATINGS Corrosion Proof, Transformable Feature D Series coating product is a water painting for spin coating, where the content of fluorine resin is far higher than other products, leading to very excellent non-adhesion. As it is mainly applied to Aluminum sheet with chemical surface treatment, the product is excellent in corrosion